Copyright © Philip M. Parker, INSEAD. Terms of Use.
| Year | Description |
| 2002 | Invention patented by Michael R. Bruce, Victoria Jean Bruce, and Rama R. Goruganthu on July 30th, 2002. Abstract: Methods and apparatus for inspecting a sample are provided. In one aspect, a method of inspection is provided that includes generating an entangled set of particle beams and directing one of the entangled set of particle beams to a location of a workpiece. One of the entangled set of particle beams interacts with the location of the workpiece. One of the entangled set of particle beams is observed after the interaction with the location of the workpiece to inspect the location of the workpiece. |
| Source: selected by the editor from original sources. | |
Copyright © Philip M. Parker, INSEAD. Terms of Use.
