D.C. reactively sputtered antireflection coatings

Year	Description
1991	Invention patented by Eric R. Dickey on September 5th, 1991. Abstract: A multilayer antireflection coating designed for deposition in in-line coating machines by DC reactive sputtering. About half of the total thickness of the coating may be formed from zinc oxide which has a high sputtering rate. Conductive transparent materials including aluminum doped zinc oxide, antimony doped tin oxide, cadmium tin oxide, and indium tin oxide may be included in the coating.
Source: selected by the editor from original sources.

Invention: D.C. reactively sputtered antireflection coatings