Clad piezoelectric valve actuator and application of same in controlling highly reactive and corrosive gases

Year	Description
1998	Invention patented by Charles E. Miller, Louis T. Yoshida, and Michael Steinbach on February 10th, 1998. Abstract: A micro-mass flow controller (10) has a sonic choked flow restriction (28) with an oscillatable valve (26) for repetitiously opening and closing the sonic choked flow restriction (28) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (28) over a period of time to something between no flow and maximum mass flow rate. A bimorph piezoelectric actuator (40) is coated in a sputtered dielectric layer (78) and then encapsulated in stainless steel or other metal cladding (80). A closure member (46) on the actuator (40) is registered to a valve seat (70) by actuating the actuator (40) to force the closure member (46) in a puddle of adhesive (86) against the valve seat (70) until the adhesive (86) cures.
Source: selected by the editor from original sources.

Invention: Clad piezoelectric valve actuator and application of same in controlling highly reactive and corrosive gases