CVD of silicon-based ceramic materials on internal surface of a reactor

Invention: CVD of silicon-based ceramic materials on internal surface of a reactor

Year	Description
1993	Invention patented by Richard Cruse, Veronika Szalai, Terence Clark, Stephen Rohman, and Robert Mininni on November 22th, 1993. Abstract: In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a thin layer of a ceramic material, the layer being deposited by thermal decomposition of a non-oxygen containing silicon-nitrogen precursor in the vapor phase, in an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.
Source: selected by the editor from original sources.