C implants for improved SiGe bipolar yield

  

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C implants for improved SiGe bipolar yield

Invention: C implants for improved SiGe bipolar yield

Year    Description
2001Invention patented by Douglas D. Coolbaugh and Kathryn T. Schonenberg on June 10th, 2001. Abstract: A method for improving the SiGe bipolar yield as well as fabricating a SiGe heterojunction bipolar transistor is provided. The inventive method includes ion-implanting carbon, C, into at one of the following regions of the device: the collector region, the sub-collector region, the extrinsic base regions, and the collector-base junction region. In a preferred embodiment each of the aforesaid regions include C implants.
Source: selected by the editor from original sources.

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