Board exchange mechanism for semiconductor test system

  

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Board exchange mechanism for semiconductor test system

Invention: Board exchange mechanism for semiconductor test system

Year    Description
1996Invention patented by Kazunari Suga on April 25th, 1996. Abstract: A board exchange mechanism for a self-diagnosis process excludes the need of disconnecting a test head from a wafer prober for installing a self-diagnosis board. The board exchange mechanism for a semiconductor test system having a plurality of test channels includes: a test head connected to the semiconductor test system and having a plurality of print circuit boards corresponding to the plurality of test channels; a wafer prober having a pin card for electrically contacting a semiconductor wafer to be tested for supplying test signals to the semiconductor wafer; a performance board for interfacing the plurality of print circuit boards and the pin card when the test head and the wafer prober are mechanically connected with each other; a self-diagnosis board which is sized equal to the size of the pin card of the wafer prober; wherein the pin card is replaced with the self-diagnosis board prior to a self-diagnosis test while the test head and the wafer prober remain mechanically connected and wherein the performance board interfaces the plurality of print circuit boards and the self-diagnosis board.
Source: selected by the editor from original sources.

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