Abatement of NF.sub.3 with metal oxalates

  

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Abatement of NF.sub.3 with metal oxalates

Invention: Abatement of NF.sub.3 with metal oxalates

Year    Description
1997Invention patented by John Giles Langan and Howard Paul Jr. Withers on November 16th, 1997. Abstract: A process for abating NF.sub.3 by contacting it with a metal oxalate or carbonate.
Source: selected by the editor from original sources.

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Webster's Online Dictionary
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