Abatement of NF.sub.3 using small particle fluidized bed

Invention: Abatement of NF.sub.3 using small particle fluidized bed

Year	Description
1997	Invention patented by Thomas Hsiao-Lin Hsiung and Howard Paul Jr. Withers on August 17th, 1997. Abstract: A process for destroying NF.sub.3 in a gas containing NF.sub.3 by contacting the gas with a fluidized bed of metal particles capable of reacting with NF.sub.3 wherein the metal particles have a particle size essentially no greater than approximately 300 microns. The process can be conducted in parallel connected switching fluidized beds wherein the beds are switched based upon achieving a predetermined bed height expansion based upon the reaction of the metal particles with the NF.sub.3.
Source: selected by the editor from original sources.