AFM with referenced or differential height measurement

Year	Description
1998	Invention patented by Dennis M. Adderton and Stephen C. Minne on November 4th, 1998. Abstract: Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.
Source: selected by the editor from original sources.

Invention: AFM with referenced or differential height measurement